Ion irradiation of the native oxide/silicon surface increases the thermal boundary conductance across aluminum/silicon interfaces
نویسندگان
چکیده
Caroline S. Gorham,1 Khalid Hattar,2 Ramez Cheaito,1 John C. Duda,1,* John T. Gaskins,1 Thomas E. Beechem,2 Jon F. Ihlefeld,2 Laura B. Biedermann,2 Edward S. Piekos,2 Douglas L. Medlin,3 and Patrick E. Hopkins1,† 1Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, USA 2Sandia National Laboratories, Albuquerque, New Mexico 87123, USA 3Sandia National Laboratories, Livermore, California 94550, USA (Received 9 February 2014; published 3 July 2014)
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